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NEWS

ձҵ춥ĸΪʲôȴEUV̻

ʱ : 2019-11-18 10:36:23 387     ԴƵ¾ӰԺ     ༭Ƶ¾ӰԺ

ձܻȫһձӵһҵڳܼӹձҵͬڶˮƽĿǰȫ򾫶ߵĸձ̫أרŶԹѧͷ⾵Ƭģ߽мӹĥܻΪҵЩȽ豸ձҵڹҵװơڰ뵼幤ҵ豸򣬸߶˹̻ȴһҺҵУASMLձѧͷܣ῵ASMLг¢ϵλȴΪ

뵼̻6Ʒݱ䣬ѾEUV̻׶ΣĿǰ14nmƳµ߶˹̻гȫASMLһռձҵܣ῵Ѿû14nmƳµ̻ҷ˸߶EUV̻зձųơеҵ豸Լ1982ձѾȫ

80ĩڣձ뵼ҵǰ٣90%DRAMձҵNEC֥ѹӢضΪȫоƬͷ뵼ҵҲձ뵼豸ҵչӣSCREENȳΪгٮٮߡΨڹ̻ϣձҵֹǰֽгøASML,ôձҵΪʲôû¸߶˹̻

Ŀǰ˵ձҵߴ˷45nmƳƳټƿ֮ʣгѡһ῵Ϊſ157nmԴһ̨Ϊףſ193nmʽ̼ASMLץס˻ᣬӦ̨磬2007Ƴ˵һ̨ʽ̻ͻ45nmƳ̣¢г

Ͽ῵ѡ˴򣬸ԭձҵг˳ȱӦ֮Ӧһ˵ձҵֻóСС֣Сƺ͸֣һЩشŷҵձ˾Щרͷ󣬼ԸгȻ˵һ׼ȷһձҵᳫʤʱۣϸڱȽרעǷȱһЩشա

ASMLɹһעؿźʹĻҵܱߵѧͿлнµӦãIMECʱ΢оASMLǰ·Ϸ˺ܴáASMLߴųɵ㲿ԹӦ̣緶ΧѰõƷͼҵͻɵзģʽǾ޽С

ձҵĻͷպܶ࣬㲿ԼڲϵͳҺٻӦ̣оγ˾޴ࡣڹ̻߶ȸӣ˹ѧеӵ·ѧѧƣרҵ֪ʶҪ󼫸ߣ˿ʽѧϰ͵֯ԵΪҪձҵ߶˹̻ԭ

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